Abstract
Brass (CuZn), nickel-silver (CuZnNi) and stainless steel (Fe18Cr8Ni) thin films were deposited by the cathodic arc plasma deposition process onto SUS304 in order to study the chemical composition change from that of the target and to determine surface roughness. The deposition variables investigated were substrate temperature and arc current. The chemical composition of each target and the prepared thin films were analyzed by atomic absorption spectrochemical analysis. The composition of both the brass and nickel-silver alloy films were studied in relation to the targets used as a function of substrate temperatures. Surface roughness was measured by the stylus method. As-deposited thin films displayed very high roughness.
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