Abstract
In this study, a four-inch zinc oxide (ZnO) nanostructure was synthesized using radio frequency (RF) magnetron sputtering to maximize the electrochemical performance of the anode material of a lithium-ion battery. All materials were grown on cleaned p-type silicon (100) wafers with a deposited copper layer inserted at the stage. The chamber of the RF magnetron sputtering system was injected with argon and oxygen gas for the growth of the ZnO films. A hydrogen (H2) reduction process was performed in a plasma enhanced chemical vapor deposition (PECVD) chamber to synthesize the ZnO nanostructure (ZnO NS) through modification of the surface structure of a ZnO film. Field emission scanning electron microscopy and atomic force microscopy were performed to confirm the surface and structural properties of the synthesized ZnO NS, and cyclic voltammetry was used to examine the electrochemical characteristics of the ZnO NS. Based on the Hall measurement, the ZnO NS subjected to H2 reduction had a higher electron mobility and lower resistivity than the ZnO film. The ZnO NS that was subjected to H2 reduction for 5 min and 10 min had average roughness of 3.117 nm and 3.418 nm, respectively.
Highlights
Many studies have recently been conducted on the viability of using transition metal oxides (Co, Ni, Cu, Mo, etc.) as anode materials for lithium-ion batteries
The Cu-zinc oxide (ZnO) film previously previously prepared on the Si substrates was inserted into the stage of the plasma enhanced chemical vapor deposition (PECVD) champrepared on the Si substrates was inserted into the stage of the PECVD chamber
The weight ratio and the atomic film and the that changed during the reduction process are shown in ratio of the ZnO film and the ZnO nanostructure (ZnO NS) that changed during the H2 reduction process are
Summary
Many studies have recently been conducted on the viability of using transition metal oxides (Co, Ni, Cu, Mo, etc.) as anode materials for lithium-ion batteries. Transition metal oxides are attracting attention for such applications due to their specific capacity (which is two to three times higher than that of carbon) They are currently used as an anode material for conventional lithium-ion batteries [1–15]. The target particles with smaller binding energy erupt due to the collision with Ar atoms These erupted target particles adhere to the substrate and form a thin film [24,25]. RF disadvantages magnetron sputtering system, Among thepaper, various methods of compensating of ZnO, one ofand the. H2 gasmethods atmosphere to widen the active and ZnO NS effective methods is changing its structure. H2 gas atmosphere to widen the active area, and ZnO NS was used as the anode material
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