Preparation and tribologic properties of Ti and Zr nitride multilayer coatings

Abstract

This paper focuses on synthesis and characterization of Zr/Ti and Ti/Zr nitride multilayer coatings by magnetron plasma sputtering to enhance the tribologic properties. The synthesis of nitrides was achieved by non-reactive deposition using Ti or Zr nitride targets or by reactive deposition using Ti or Zr targets in the presence of nitrogen. The formation of nitride layers was highlighted by XRD, EDX and XPS investigations, while the tribologic properties were made with HFRR equipment. The tribological study showed that the coefficient of friction and wear scar diameter decrease in multilayer films with zirconium nitride as the upper layer.