Abstract
The CaCuO2 thin film was prepared by a dc magnetron sputtering system onto Al2O3 substrate. The CaCuO2 sputtering target was synthesized by solid state reaction (SSR) method from raw powders of CaCO3 and CuO to be loaded into vacuum chamber for thin film deposition. As-deposited thin film samples were annealed at 400, 500, 600, 700 and 800 °C for 1 hour in air. The effects of temperature annealing on phase identification, atomic composition, sheet resistance and Seebeck coefficient or thermopower of thin film samples have been investigated by X-ray diffractometer (XRD), energy dispersive X-ray spectroscopy (EDS), field-emission scanning electron microscopy (FE-SEM), four point probe method and steady state method, respectively.
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