Abstract
AbstractTransparent, electrically conductive films have been prepared from several different metal oxides, including those of tin, indium and zinc. Deposition methods for these materials are reviewed, and their properties summarized and compared. A figure of merit for a transparent conductor may be defined as the ratio of the electrical conductivity to the optical absorption coefficient of the film. The figure of merit for fluorine-doped zinc oxide is shown to be larger than that of other transparent conductors, such as boron-doped zinc oxide, fluorine-doped tin oxide, and tin-doped indium oxide. Physical, chemical and thermal durability, deposition temperature, and cost are other factors which may also influence the choice of material for a particular application.
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