Abstract
Strontium barium niobate (Sr0.3Ba0.7Nb2O6, SBN) thin films were deposited on silicon substrate by using the radio frequency magnetron sputtering and under different deposition power and time at room temperature. Surface morphology and thicknesses of the SBN thin films were characterized by field emission scanning electron microscopy. The crystallization films at different deposition power and time were analyzed by X-ray diffraction (XRD) using CuKα radiation from a Rigaku rotating anode with an incident angle of 2°. The remnant polarization (Pr), saturation polarization (Ps), and minimum coercive field (Ec) properties of the metal-ferroelectric-metal (MFM) structure were measured using ferroelectric material test instrument. The SBN thin films deposited at 90 min and 125 W had the maximum Pr, Ps, and minimum Ec of 1.26 μC/cm 2 , 2.41 μC/cm 2 , and 201.6 kV/cm, respectively. From above results, it knows that the SBN thin films suit for application on ferroelectric random access memory (FeRAM).
Highlights
Ferroelectric materials are an important class of materials whose main characteristic is the presence of a spontaneous polarization that can be changed with an external electric field
The influence of deposition power and time on the crystallinity and ferroelectricity of SBN thin films was studied using the analysis of scanning electron microscopy and X-ray diffraction, and the measured of leakage current and polarization, respectively
The SBN thin films deposited at 90 min and 125 W had the maximum remnant polarization (Pr), saturation polarization (Ps), and minimum coercive field (Ec) of 1.26 μC/cm2, 2.41 μC/cm2, and 201.6 kV/cm, respectively
Summary
Ferroelectric materials are an important class of materials whose main characteristic is the presence of a spontaneous polarization that can be changed with an external electric field. The tungsten bronze family is one of several ferroelectric materials that includes niobates such as (Sr,Ba)Nb2O6 (SBN), (Pb,Ba)Nb2O6 (PBN) and (Pb,K)Nb2O6 (PKN). The SBN solid-solution series crystallize in the tetragonal tungsten bronze (TTB) structure. At room temperature it has the symmetry of the space group P4bm for 0.25 < x < 0.75. Sr0.7Ba0.3Nb2O6 (SBN) thin films were obtained by a radio frequency (RF) magnetron sputtering method at room temperature. The influence of deposition power and time on the crystallinity and ferroelectricity of SBN thin films was studied using the analysis of scanning electron microscopy and X-ray diffraction, and the measured of leakage current and polarization, respectively
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