Preparation and properties of hydrogenated amorphous silicon films by glow discharge decomposition of silane in cascade reactors

Abstract

A novel and economical method for the preparation of the hydrogenated amorphous silicon films by glow discharge composition of silane in two reactors connected in cascade is presented. Whereas the films obtained from the first reactor have nearly the same dark and photoconductivity as reported in literature, those from the second reactor exhibit four orders less dark conductivity and one order less photoconductivity for the same deposition conditions.