Abstract
Transparent Sb-doped SnO2 films were prepared at 600° C on glass substrates by thermal decomposition of tin 2-ethylhexanoate and antimony tributoxide. The films 100 to 300 nm thick, which are composed of fine particles, were very smooth. The films showed no preferred orientation. The minimum resistivity (2.1×10−2Ω cm) was attained at a concentration of 8 at% Sb on the substrate precoated with SiO2. The transmission of these films was about 80% over a wavelength range from 0.4 to 2.0 μm.
Published Version
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