Abstract

CO2 gas sensor based on multiple ZnO nanowires was fabricated using sol-gel technique. ZnO nanowires were grown with AAO template. Ti/Al electrodes were deposited on un-doped Si substrate separately. Nanowires were deposited on these electrodes by simple drop coat technique. Crystallographic structure, surface morphology, I-V characteristics of nanowires were determined by XRD, SEM and source meter respectively. Gas sensing measurements of as-grown and annealed nanowires were taken at different temperatures and gas flow rates with self-designed gas chamber. Gas sensor showed good sensitivity of 3.8% at 15 lit/min gas flow at 200 oC. Sensor showed fast response and recovery time of 8s and 40s respectively.

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