Abstract

Films of anatase were prepared on silicon and silica supports by ultrasonic nebulization of an ethanol solution of titanium acetylacetonate followed by pyrolysis and annealing in oxygen at 380°C. The transformation to rutile occurred in the temperature range 800–950°C without degradation of the film quality. TiO 2 films could be slightly reduced to TiO 2−x at 500°C in an atmosphere of pure hydrogen and further reduction, giving increased conductivity, occurs at elevated temperature. These films were comparable in quality to those prepared by more elaborate techniques.

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