Abstract
Organic thin films were prepared on substrates by a radio-frequency sputtering method using a polyimide film (Upilex-S) target, and some of them were successfully obtained as self-supporting thin films. It was found that these films were insoluble in an organic solvent, indicating that they were polymeric. The spectra of Fourier Transform Infrared Spectroscopy (FT-IR), X-Ray Diffraction (XRD) and optical absorption showed that the deposited films were amorphous but polyimide-like. The high durability of the films against heat and wear was also evaluated. Results suggested that these polymer-like films may be used as practical film materials for organic or hybrid electronic devices.
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