Preparation and Characterization of Ni-AAO Composite Scaffold Getter with Induction Heating

Abstract

Non-evapotranspiration getter (NEG) is widely used in the field of MEMS vacuum packaging, the development of vacuum packaging devices is restricted by the low adsorption capacity and long activation time of 2D planar thin film getter. In view of this article, a composite porous scaffold getter which can be activated rapidly by induction heating was proposed. Through experimental investigation, the Si-Ni-Al composite scaffold with a pore distance of 650 nm and a pore diameter of over 700 nm was finally prepared. The test results showed that the prepared composite porous scaffold base getter could be heated to over 700 °C by micro-flexion induction within 15s to realize the activation and reactivation of the Ti film getter. The composite porous getter can adsorb gas molecules with a mass of 6.01% with its maximum adsorption rate of 89.4×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-4</sup> mg/(s.g).