Abstract

LiNbO 3 thin films with well-developed grains were fabricated by spin-coating on SiO 2 (111) substrates. Annealing in static air and oxygen atmosphere was performed at 400° C 500° C 600° C for 3 h. The films obtained were characterized by thin film XRD, scanning electron microscopy and elemental analysis. Electrical characterizations of the films pointed to ferroelectricity via hysteresis loop. The influence of oxygen atmosphere on crystallization, morphology and properties of LiNbO 3 thin films is discussed.

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