Abstract
Thin films of lithium niobate were deposited on Pt/Ti/SiO 2 (111) substrates by spin coating from the polymeric precursor method (Pechini process). Annealing in static air was performed at 500 °C for 3 h. The obtained films were characterized by X-ray diffraction and atomic force microscopy. The dielectric constant, dissipation factor and resistance were measured in frequency region from 10 Hz to 10 MHz and the hysteresis loop was obtained. The influence of number of layers on crystallization, morphology and properties of LiNbO 3 thin films is discussed.
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