Abstract
RC null networks are widely used in communication and instrumentation systems not only for eliminating undesired frequencies and for measuring transient harmonic distortions but also as central components of selective filters and oscillators in feedback arrangements. An important trend in modern integrated electronics is toward decreased size and increased reliability of electronic systems. This paper describes the characteristics of Y-doped BaTiO3 and TaN films for a Au / TaN / Y-doped BaTiO3 / Pt notch filter. The dielectric (Y-doped BaTiO3) and resistive (TaN) films were grown by pulsed laser deposition. Y-doped BaTiO3 film at 700°C deposition temperature has a dielectric constant of ∼1300 and loss of 0.03 at 1kHz. TaN films at 300°C have a sheet resistance of 670Ω at room temperature and temperature coefficient of resistance (TCR) of -922ppm/°C. A notch frequency of 2.8MHz and depth of -7.6.7dB from the resulting uniformly distributed RC notch filters were measured at a notch resistance (RN) of 34Ω. The experimental optimum notch parameters of α = R/ RN = 19.7 and xn = ω/ω= 33.0 were obtained.
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