Abstract
Barium strontium titanate–alumina composites were fabricated using a sol–gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba0.8Sr0.2)TiO3 (BST) films were formed by spin coating and subsequent annealing at 150–550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.
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