Abstract
The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5–3 keV He + and He + + Ar + ions has been measured by ion scattering spectroscopy with He + ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He + and Ar + ion bombardment, however the preferred sputtering is more pronounced for Ar + ions than for He + ions. The ion bombardment with He + ions at elevated sample temperatures hardly results in any change in surface composition below ∼800°C, while Ar + ion bombardment results in C enrichment for elevated temperatures as reported so far.
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