Abstract
The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5–3 keV He + and He + + Ar + ions has been measured by ion scattering spectroscopy with He + ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He + and Ar + ion bombardment, however the preferred sputtering is more pronounced for Ar + ions than for He + ions. The ion bombardment with He + ions at elevated sample temperatures hardly results in any change in surface composition below ≈ 800°C, while Ar + ion bombardment results in C enrichment for elevated temperatures as reported so far.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
