Preferential sputtering of oxides: A comparison of model predictions with experimental data

Abstract

Experimental data on the composition of the altered layer of some oxides bombarded with noble gas ions are compared with different model predictions based on Sigmund's sputtering theory. It is shown that although the difference in mass of the metal atoms is the dominant factor in the preferential sputtering of oxygen, the additional consideration of the surface binding energies yields an improved agreement between theory and experiment.