Prediction of Single Phase Formation of Non-equilibrium Pseudobinary Nitrides Assisted by Energetic Particle Bombardment

Abstract

Single phase formation of non-equilibrium pseudobinary nitrides with Bl structure assisted by energetic particle bombardment has been studied from the standpoint of structural stability based on band parameters. The critical solubility of AlN for single phase pseudobinary Al-Ti-N films is predicted to be about 65 mol % from the structural map and two band parameters, which are constructed from orbital electronegativities. The critical solubility of AlN for Al-Ti-N films shows excellent agreement with the experimental results. It is indicated from the structural map that the highest solubility of AlN for Al-M-N films(M; transition metal) assisted by energetic particle bombardment is obtained for the Al-Cr-N system. Further, it is suggested that the formation of non-equilibrium Al-M-N single phase with B1 structure is connected with stabilization of B1 type AlN.