Abstract
Surface generation is a powerful technique for the investigation into surface generation mechanism, prediction, and optimization, widely employed in ultra-precision diamond turning, in ultra-precision raster milling (UPRM), etc. but not by costly trial and error experiments. Its modeling has been developed from a pure geometric model, a dynamic model to an integral model. In the chapter, integrated with the previously proposed five-degree-of-freedom spring-mass-damper dynamic model of an aerostatic bearing spindle for spindle vibration, the surface generation model has been presented to depict surface topographies of UPRM. Following the surface generation model, the prediction model and an optimization model have been proposed to predict and optimize surface generation under spindle vibration and cutting conditions in UPRM.
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