Precision Adjustment of Probe Tilt Angle with RF Signal Detection Technique

Abstract

This article proposes a breakthrough technique for the precision adjustment of the tilt angle of a radio frequency (RF) probe. The proposed technique utilizes the resonance generated at the probe tips. The adjustment technique is demonstrated in the frequency range between 190 and 340 GHz (300–GHz band). The proposed technique significantly reduces the variation in the probe-tilt angle in comparison with conventional manual inspection. Furthermore, the measurement repeatability of the proposed technique is better than that of the conventional manual technique. The proposed adjustment technique greatly improves the measurement repeatability of the on-wafer measurement in the 300–GHz band.