In-situ automatic adjustment of probe positions and tilt angles for GSGSG probe

Abstract

This paper proposes a new technique for the precision adjustment of probe positions including tilt angle of a radio-frequency (RF) probe. The adjustment technique is demonstrated for ground-signal-ground-signal-ground (GSGSG) probe. The proposed technique can be operated not only on filled-conductor, but also on commonly used coplanar-waveguide contact pad for a GSGSG probe. The proposed technique significantly reduces the variation in the probe tilt-angle, compared to a conventional manual technique. This unique feature resulted in improvement of measurement repeatability in the frequency range up to 110 GHz.