Abstract
Ar ion sputtering is one of the most accepted techniques for depth profiling in practical XPS analysis, although this technique is known to be inadequate for quantitative analysis of glass including mobile ions such as soda–lime–silica glass. Buckminsterfullerene (C60) ion sputtering has recently been recognized to suppress the composition change of glass and the degradation of organic materials. Here, C60 ion sputtering was applied to examine the change of the compositional depth profile on soda–lime–silica glass (70.4SiO2, 0.9Al2O3, 7.3MgO, 7.8CaO, 13.6Na2O in mol%) surface in detail because of various treatments such as annealing, washing, polishing, and storage. The precise analysis revealed that the sodium profile changed variously within 30 nm depth. Copyright © 2012 John Wiley & Sons, Ltd.
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