Abstract
Nanomechanical system (NMS) based on amorphous carbon nanowhiskers localized on the top of tungsten tip were fabricated and investigated. The whiskers were grown in the scanning electron microscope (SEM) chamber using focused electron beam technique. The manipulation of SiO2 and TiO2 nanospheres was provided in SEM by means of dielectrophoretic force. Oscillation trajectories and amplitude-frequency characteristic of the oscillator were visualized at low pressure using a scanning electron microscope. The estimation of mass sensitivity of NMS was conducted.
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