Abstract
A method for measuring and modeling dominant kinetic rates and mechanisms in situ for an rf plasma has been developed. The coupling of small periodic power ] modulation(1)) of the discharge with transfer function analysis(2) provides a novel way to study the dominant reaction kinetics in the plasma environment. In this paper we review relaxation techniques used previously to study kinetics in the plasma and present a general description of relaxation methods. The theoretical analysis of transferfunctions for plasma power modulation is detailed with examples illustrating how information is assessed. The theoretical analysis is complemented by detailed descriptions of experimental transfer function development using phase-sensitive measurements. This explicit modeling of the transfer function requires knowledge of reaction rate coefficients, stoichiometry, and plasma conditions such as pressure, temperature, and residence time.
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