Abstract
The dominant chemical reaction kinetics occurring in the plasma environment are studied by small periodic power modulation and analyzed using transfer functions. A CF4/Ar rf plasma at 500 mTorr was chosen to validate this experimental methodology because the kinetics of the CF, system have been well studied previously.(1) The experimental results demonstrated that the modulation technique can determine dominant reactions in the plasma. The experimental results also confirmed the importance of surface recombination reactions and provided quantitative total sticking coefficients for F, CF2 and CF: γF=0.02, γCF2=0.05, and γCF≥0.20. The results also indicated that an activated intermediate may be a precursor to the formation of both CF2 and CF from CF4. Energetic considerations and excited-.state lifetime calculations suggest that this activated intermediate may be an internally excited CF3* radical.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
