Powder synthesis and electrical, dielectric spectroscopic characterization of rare earth disilicates (D-Er2Si2O7): Transistor scaling-22 nm or beyond

Abstract

Rare earth disilicates are now a day's being analyzed as a dielectric layer for transistor scaling for the advanced 22nm regime or beyond. So to explore these materials, the polymorphic powdered Er2Si2O7 (D phase) is synthesized by solid state double sintering method to study its characteristics. Structural characterization has been performed by X-ray diffraction. SEM and EDX results shows the rods like morphology of particles and composition. The dc electrical properties are evaluated by two probe method as a function of temperature. The dielectric spectroscopic measurements of D-Er2Si2O7 are performed in the temperature range 300–420K and frequency range 1kHz to 1MHz. The dc electrical transport phenomenon is analyzed using Mott’s variable-range hopping approach. The ac conductivity σac(ω) is obtained through the dielectric spectroscopic measurements.