Abstract
The influence of the pre-treatment of starting powders for Al2O3-polyimide composite thick films fabricated by an aerosol deposition (AD) process was investigated. The microstructures and the dielectric properties of the Al2O3-polyimide composite thick films in relation to their particle size of polyimide in the starting powder were characterized. As a result, polyimide starting powders larger than 1 μm in size were remained in the films after the deposition. Also, the Al2O3-polyimide composite thick films showed high loss tangents with large frequency dependences when the polyimide starting powders larger than 1 μm in size were used, due to the porous microstructure with cracks and rough surfaces. In comparison, the Al2O3-polyimide composite thick films had dense nanostructures, and the number of pores and cracks in the films were also noticeably decreased by using polyimide powders of less than 1 μm. Moreover, the frequency dependence of loss tangent was remarkably decreased, and the loss tangent was totally decreased below 0.01.
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