Abstract
AbstractIndium tin oxide (ITO) thin films were deposited onto flexible polyimide substrates using RF sputtering system at room temperature. The deposited films were then heat treated at different temperatures in air and vacuum atmospheres. The structural variations and as consequence the electro‐optical characteristic variations of the films were systematically investigated as a function of post annealing temperature and atmosphere. The structure of the films was studied by means of XRD and SEM techniques and the electro‐optical characteristics were measured by four point probe and spectrophotometer, respectively. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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