Abstract
Cu–Se, In–Se and CuInSe 2 films obtained by D.C. magnetron sputtering on molybdenum substrates were studied by X-ray diffraction (XRD) and positron annihilation spectroscopy (PAS). The XRD data showed that all studied films are crystalline and some of them are textured. Positron lifetime technique indicated the presence of monovacancy and small vacancy clusters. The annealing at 400 °C for 1 h influenced the phase composition, surface morphology and defect structure.
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