Abstract

Micromanipulation has become an issue of primary importance in industry and biomedicine, the manual capabilities being restricted to certain tolerances. For example manipulation of biological cells or an assembly of a whole microsystem composed of different microcomponcnts have to be carried out by piezo electrically-driven miciorobots. For this reason, an automated microrobot-based micromanipulation station is developed by an interdisciplinary group at the University of Karlsruhe. The process of assembly takes place in the field of view of a light optical microscope. The principal sensors of the S3rstem are CCD cameras. One of them, coupled with the microscope, is the local sensor that allows the automation of the manipulation process under the microscope. A second one, the global sensor, supervises the entire system. In this work we present the first step of a method for the detection of faults occurring during the manipulation process. This first stage consists of detecting and processing a position deviation of the microrobot.

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