Abstract
Individual SnO2 nanowires were integrated in suspended micromembrane-based bottom-up devices.Electrical contacts between the nanowires and the electrodes were achieved with the helpof electron- and ion-beam-assisted direct-write nanolithography processes. Thestability of these nanomaterials was evaluated as function of time and appliedcurrent, showing that stable and reliable devices were obtained. Furthermore, thepossibility of modulating their temperature using the integrated microheater placedin the membrane was also demonstrated, enabling these devices to be used ingas sensing procedures. We present a methodology and general strategy for thefabrication and characterization of portable and reliable nanowire-based devices.
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