Abstract
We studied the influences of the thickness of the porous silicon layer and the conductivity type on the porous silicon sensors response when exposed to ethanol vapor. The response was determined at room temperature (27 C) in darkness using a horizontal aluminum electrode pattern. The results indicated that the intensity of the response can be directly or inversely proportional to the thickness of the porous layer depending on the conductivity type of the semiconductor material. The response of the porous sensors was similar to the metal oxide sensors. The results can be used to appropriately select the conductivity of semiconductor materials and the thickness of the porous layer for the target gas.
Highlights
Gas sensing has great importance in environmental monitoring and protection
The response intensity increased as the thickness of the porous layer increased, showing a proportional relation
For the same target gas (EtOH), the intensity of the response and the stability depended on the thickness of the porous layer, and the silicon conductivity type
Summary
Gas sensing has great importance in environmental monitoring and protection. The need for cheap, small, low-power-consuming, and reliable solid-state gas sensors has grown over the years.One important research line concerns metal-oxide based sensors. Gas sensing has great importance in environmental monitoring and protection. The need for cheap, small, low-power-consuming, and reliable solid-state gas sensors has grown over the years. One important research line concerns metal-oxide based sensors. The development of information technology has triggered a large amount of research worldwide to overcome metal oxide sensor drawbacks, summed up in improving the well-known “3Ss”: sensitivity, selectivity, and stability [1]. The electrical resistance changes upon gas adsorption onto metal oxide sensors has been well studied, and detailed models regarding the sensor-gas mechanism were proposed [2,3]. The primary disadvantage is the high-power consumption as its operation is heater based
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