Abstract
True zero-order wave plates operating in the deep ultraviolet (DUV) range are produced from porous silica having very small in-plane optical anisotropy (refractive index anisotropy: ∼0.001). Small temperature (4.3×10−5λ/°C) and angle-dependent shifts of the retardance are obtained in the DUV range. The retardance shifts are 0.007λ and 0.035λ when the plate is tilted 15° on the [001] and [11¯0] axes, respectively. From the angle dependence, the shape of the refractive index ellipsoids is discussed.
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