Porous lead zirconate titanate ceramics with optimized acoustic properties for high-frequency ultrasonic transducer applications

Abstract

Acoustic properties of porous PZT ceramics intended to be used as backing in high-frequency transducer applications are investigated using a novel method where an electroded piezoelectric thick film is deposited on the backing under test. Two backings with pore sizes 1.5 μm and 10 μm were obtained by sintering a mixture of ceramic powder and an organic template, their porosity was evaluated by scanning electron microscopy at 15%, leading to a density around 6.5 g/cm3. The electroacoustic impulse responses of these devices were measured considering the backing as a propagation medium, the initial thickness of which was chosen small enough to allow back-wall echoes to be detected and large enough to be able to separate the signals in time domain. Then the thickness of the backing was reduced (from around 2 mm to less than 1 mm) and the measurements were repeated. Acoustic properties were then deduced: attenuation coefficients reaching 4 dB/mm/MHz and group velocities around 3400 m/s were obtained, leading to an acoustic impedance around 22 MRa. Such combination of high attenuation and moderate acoustical impedance make these materials an interesting solution for high-resolution ultrasonic imaging transducers.