Abstract
We have designed and fabricated polysilicon microscanners using surface micromachining technologies. The scanners have electrostatic-comb actuators to drive 300 × 400 μm 2 micromirrors mounted on stationary frames by torsion bars. Torsion-bar mounting improves scanning precision from what is achievable using hinge mounting with journal bearings. The scans are accurate to 0.19 mrad; that is a scan jitter of 0.1% of the full scale, or 9% of a pixel. A 7 × 10-pixel laser-scanning display built with a seven-element, fan-diode-laser array and a scanning polysilicon micromirror is presented. A dual-axis, raster-scanning system based on similar resonant microscanners can be integrated on a chip with the light sources to produce compact microdisplay modules.
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