Abstract
A new surface micromachined silicon sensor for highly accurate angle detection is presented. The principle of transduction is based on the Lorentz force in combination with a differential capacitance sensing technique. The transducer may also serve as a reliable position and magnetic field sensor. In contrast to other angle detection sensors, this sensor is completely based on surface micromachining technology. The fabrication of the transducer is therefore fully compatible to the fabrication of other surface micromachined sensors, like accelerometers, yaw rate sensors, etc. This is a very important feature regarding mass production, specially in the automotive industry.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.