Polymer-Based Ultrasonic Motors Utilizing High-Order Vibration Modes

Abstract

Our previous studies showed that traveling-wave rotary ultrasonic motors with polymer-based vibrators yielded limited output power when operating in the commonly used low-order bending vibration modes. In this study, we employ a high-order bending mode in the polymer-based cylindrical ultrasonic motor, because this mode yields a relatively high electromechanical coupling factor, which may lead to high output power of the motor. Additionally, in contrast with the low-order modes with only vertical nodal lines, the high-order mode has both horizontal and vertical nodal lines on the circumferential outer surface of the polymer-based vibrator. With these attractive advantages, it is worth investigating basic vibration characteristics of polymer-based vibrators operating in high-order modes and their applications to ultrasonic motors. The vibrating body is made of poly phenylene sulfide, a functional polymer exhibiting low mechanical loss even under high-amplitude ultrasonic vibration and is activated by a piezoelectric ceramic element bonded on the back surface. The high-order modes are optimal for polymer-based vibrators with practical thicknesses, because their equivalent stiffnesses and masses are relatively low when operating in this mode. Polymer-based motors with the high-order modes exhibit relatively high output torques and powers, compared with not only polymer-based motors with low-order bending modes, but also metal-based motors operating in high-order vibration modes.