Abstract
Polymer materials exhibit unique properties in the fabrication of optical waveguide devices, electromagnetic devices, and bio-devices. Direct laser writing (DLW) technology is widely used for micro-structure fabrication due to its high processing precision, low cost, and no need for mask exposure. This paper reviews the latest research progresses of polymer-based micro/nano-devices fabricated using the DLW technique as well as their applications. In order to realize various device structures and functions, different manufacture parameters of DLW systems are adopted, which are also investigated in this work. The flexible use of the DLW process in various polymer-based microstructures, including optical, electronic, magnetic, and biomedical devices are reviewed together with their applications. In addition, polymer materials which are developed with unique properties for the use of DLW technology are also discussed.
Highlights
Devices based on low-cost polymer materials have been widely used in various fields, such as optics, electromagnetics, and biomedicine [1,2,3,4].For the applications of optical devices, polymer-based optical materials have been commonly used in the fabrication of optical waveguides, polymer fibers, and micro-optics devices [5,6,7,8,9,10] due to the high optical transmission properties, good plasticity, and excellent mechanical stability
The Direct laser writing (DLW) method adopted in this work is based on the low one photon absorption (LOPA) effect using polymer-based nanocomposites with SU-8 2005 photoresist and Fe3 O4 nanoparticles
Recent progress of using DLW technology for the preparation of polymer-based devices as well as their applications are reviewed in this work
Summary
Devices (here including devices/structures/patterns) based on low-cost polymer materials have been widely used in various fields, such as optics, electromagnetics, and biomedicine [1,2,3,4]. For the applications of optical devices, polymer-based optical materials have been commonly used in the fabrication of optical waveguides, polymer fibers, and micro-optics devices [5,6,7,8,9,10] due to the high optical transmission properties, good plasticity, and excellent mechanical stability. The use of DLW technology for the polymer-based device fabrication, a combination of both advantages, has broadened the application of DLW method and have shown its unique superiority and practicality in the fields of micro-optics, microelectronics, as well as biomedicine. In the manufacture of specific structures based on different applications, the determination of these two parameters needs to be investigated and accurately determined During the experiment, both the polymerization threshold conditions of the selected polymer materials and the mechanical stability of the prepared structure need to be taken into account.
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