Abstract
In this study, He/O2 plasma mixture, induced in a radio frequency (RF) low‐pressure remote plasma system, has been characterized and employed for polymer surface modification. Actinometry optical emission spectroscopy (AOES) and Langmuir probe techniques were used to evaluate the plasma active species contributing to polymer surface modification. These active species involve the atomic oxygen [O] and the electrons (ne). Five different polymers (poly(methyl methacrylate) [PMMA], polytetrafluoroethylene [PTFE], polyethylene [PE], polyvinyl chloride [PVC], and polystyrene [PS]) were plasma treated and subsequently characterized for etching rate, surface morphology using atomic force microscopy (AFM) technique, and chemical elemental composition using X‐ray photoelectron spectroscopy (XPS) technique.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
