Abstract
Polymer optical waveguide vertical optical coupler and mode division (de)multiplexer on optical printed circuit boards have garnered considerable attention. We have studied a stepped laser-ablation method for the fabrication of concave micromirrors in rectangular optical waveguides. The vertical coupling loss can be reduced to 1.83 dB experimentally. Further, based on gray-tone optical lithography technology combined with the overlay alignment method, a spherical concave micro-mirror has been fabricated, with the vertical coupling loss of 1.39 dB. Furthermore, a polymer three-mode (de)multiplexer with two cascaded waveguide directional couplers is proposed. The device can ensure that the E11 mode of the two narrower waveguides are highly coupled into the E21 and E31 modes of the central waveguide. The fabricated device exhibits coupling ratios of 98.07% and 95.43%. Moreover, a two-mode (de)multiplexer has been studied. The coupling ratio and extinction ratio of the fabricated (de)multi
Published Version
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