Poly(methyl methacrylate) degradation during x-ray photoelectron spectroscopy analysis

Abstract

Poly(methyl methacrylate) (PMMA) was chosen as a model lithographic material to study the effect of A1 Kα radiation and the thermal (flood gun) electron flux on polymer surface. The main chemical changes, which can occur in polymers by radiation, are (1) main-chain scission, (2) cross linking, and (3) volatile product formation and cyclization. The data shows that, although the flood gun electrons do not affect the PMMA surface, the x-ray radiation causes degradation in molecular weight by main-chain scission.