Abstract
Polarized Raman measurements were performed on P-doped diamond films to investigate the origin of the peaks in the lower wave numbers, which are unknown to date, and a comparative study of several P-doped substrates was conducted. The measurements with four configurations of the polarized geometries were carried out for five samples with different P and H concentration, [H]/[P] ratios, and film thickness. For four highly P-doped films, several Raman peaks were observed for all four configurations; retaining the Oh7 cubic structure of diamond, presumably relate to substitutional sites. For a sample of high [H]/[P] ratio (=1.17) and a very thick film, several other peaks were observed. The peak appearances for four configurations indicate that the origin is not in the Oh7 diamond structure but presumably interstitial sites. In the future, it may be possible to realize effective P doping by the improvement of film synthesis by utilizing the results of Raman polarization measurements, which are simple and nondestructive.
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