Abstract
In order to obtain a grating solution for high laser resolving power, a multilayer fused-silica reflection grating is described with a silver layer embedded in the groove in second-order Littrow configuration instead of first-order mounting. Efficiencies of 96.17% and 96.14% can diffracted in −2nd order for TE and TM polarizations, which are greater than 96%. The new multilayer reflection grating with a silver layer embedded has good incident characteristics and process tolerances. Therefore, the high-efficiency output with polarization-independent and wideband property characteristics of the grating will be well applied to the laser field.
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