Abstract
We demonstrate a reflection-enhanced high-speed photodetector, which integrated a mushroom-mesa p–i–n structure on a two-dimensional (2D) nonperiodic focusing grating. Mushroom-mesa p–i–n photodetectors exhibit a high frequency response owing to their low resistance capacity (RC) time constant. 2D nonperiodic focusing gratings not only can increase the external quantum efficiency of the device owing to their reflecting and focusing abilities, but also are not sensitive to the polarization of the incident light. The external quantum efficiency of this device is 44.71% and the measured 3 dB bandwidth is up to 32 GHz.
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