Abstract
Structural anisotropy of the SiOx films and light emitting nanostructures, prepared by oblique deposition of silicon monoxide in vacuum, has been studied using the polarization conversion (PC) effect. For this purpose, a simple method of PC investigation with usage of a standard null-ellipsometer is proposed and tested. This method is based on the analysis of the azimuthal angle dependence of the off- diagonal elements of the Jones matrix. The electron microscopy study shows that obliquely deposited SiO x SiO Si - nc −
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