Abstract
Water (H2O) vapor-induced degradation of SrBi2Ta2O9 (SBT) capacitors has been investigated. SBT capacitors with no passivation layer were maintained in the atmosphere at 20°C for one-half year after their preparation. The capacitors showed pronounced degradation of polarization and increased leakage currents. A recovery process based on H2O vaporization from the SBT films was examined. We succeeded in completely recovering the polarization, fatigue and leakage current characteristics using thermal annealing at 300°C in a vacuum.
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