Abstract
We report angular and polarization dependent transmission properties of Fano resonance optical filters with transferred silicon nanomembrane on glass substrate. The transmission spectra of the filters can have either weak or strong polarization and angular dependence, depending on properties of individual Fano resonance modal dispersion. Measurement results agree very well with simulations based on a rigorous coupled-wave analysis for the transmission spectra, on planewave expansion wave-vector technique for the dispersion property analysis, and on a three-dimensional finite-difference time-domain technique for the propagating modal study. These results will provide importance guidance for the design of a new class of ultra-compact surface-normal frequency selective components with preferred polarization and angular properties. These components are highly desirable for silicon photonic integration.
Highlights
Surface-normal ultra-compact optical filters are of great importance in optical fiber communications, optical sensors, and millimeter-wave communication systems
The angular and polarization dependent properties were reported for Fano resonances with transferred Si nanomembranes on glass substrates
For surface-normal incident beam, there is no angle/polarization dependence on the spectral locations of Fano resonances based on transmission spectra
Summary
Surface-normal ultra-compact optical filters are of great importance in optical fiber communications, optical sensors, and millimeter-wave communication systems. We have successfully demonstrated Fano filters based on patterned silicon nanomembranes (SiNMs) transferred onto transparent low index glass and flexible polymer substrates [13,14]. We report the detailed analysis on the polarization and angle dependent transmission properties on Si Fano filters transferred onto glass substrate. The Fano filters reported here, fabricated with transferred SiNMs on low index glass substrates, are expected to have different polarizationand angular- dependent transmission properties due to the asymmetric vertical confinement. We first briefly describe the design, fabrication and characteristics of Fano filters on glass substrates, followed by detailed analysis on the measured and simulated angular- and polarization- dependent transmission properties.
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