Abstract
In this research, the polar decomposition (PD) method is applied to experimental Mueller matrices (MMs) measured on two-dimensional microstructured surfaces. Polarization information is expressed through a set of parameters of easier physical interpretation. It is shown that evaluating the first derivative of the retardation parameter, δ, a clear indication of the presence of defects either built on or dug in the scattering flat surface (a silicon wafer in our case) can be obtained. Although the rule of thumb thus obtained is established through PD, it can be easily implemented on conventional surface polarimetry. These results constitute an example of the capabilities of the PD approach to MM analysis, and show a direct application in surface characterization.
Highlights
For a scattering system illuminated by a given incident wavelength, the Mueller matrix (MM) is a complete polarimetric result, in the sense that it contains all information about the scattering properties of a system, as far as intensity and polarization of the scattered radiation are concerned
Using a Dual Rotating Compensator Polarimeter (DRCP) polarimeter, these matrices were experimentally obtained for several flat surface systems containing square-profiled structures that are either built on or dug in the surface
As an application of polar decomposition (PD), we have established a polarimetric criterion that allows us to distinguish between both types of surface microdefects in a systematic way, regardless of size or composition of the sample
Summary
For a scattering system illuminated by a given incident wavelength, the Mueller matrix (MM) is a complete polarimetric result, in the sense that it contains all information about the scattering properties of a system, as far as intensity and polarization of the scattered radiation are concerned. The elements of the MM contains encrypted information, and are not related to the properties of the system, unless some kind of transformation is introduced. Pursuing this idea, MM decomposition, i.e., expressing it as a product—or sum—of several. If it is proved that a particular feature of the system is related to any of the parameters contained in such matrices, a more direct way of analysis is opened. Since the PD is an MM algebraic transformation, all results obtained can be applied to conventional polarimetry through an adequate manipulation of the elements mij. For a particular sample, there would be no need for individual analysis of patterns, or comparisons with numerical results, in order to know to which family of microstructures it belongs
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